Sharing the fundamental structure with UF3000EX, the prober offers high-cost performance.
For more details, contact us at (049) 544-1111 or send us your inquiries at dennish.solis@edgeworthcorp.com.
Sharing the fundamental structure with UF3000EX, the prober offers high-cost performance.
For more details, contact us at (049) 544-1111 or send us your inquiries at dennish.solis@edgeworthcorp.com.
1. High throughput is realized by synergetic effect of XY stage with high-speed and great quietness created by the high-speed wafer handling and exclusive driving unit. Furthermore, Z axis achieved the load bearing and high precision of the world’s highest standard.
2. It is equipped with high-magnification optical system of the color camera, and improved the operability by adopting large display with the original operability.
3. It can adopt every testing environment with flexibility by combining wide variety of options.
4. QPU – Super High-rigid Chucking (Quad-Pod Unit)
To effectively attain the accuracy in positioning, the high rigidity of every part is greatly important.
The UF3000 uses the new technology of 4 axes driving mechanism (QPU) for Z-axis, enabling the high-rigid, stable probe contact.
5. TTG (Touch To Go)
Pursuing the easy operation, the UF3000 adopts the function to move to the position you touch on the map or image shown on the touch panel.
Setting up is easy, and screen configuration is possible by the user definition.
| Applicable wafes | Wafer size | 200mm, 300mm |
| Thickness | 300 to 1000um | |
| Thickness Variation | +/-50um max. | |
| Die size | 0.2mm to 100mm (not exceeded to 1,000,000 chips) | |
| Overall precision | ||
| Multi-probing | Maximum sites | 256 sites |
| Probe area | +/-170mm max | |
| Stage precision | +/-0.5um | |
| X, Y axis | Resolution | 0.5nm (0.0005um) |
| Max. speed | XY : 500mm/s | |
| Static load withstand (horizontally) | 20kgf | |
| Max. stroke | 37mm | |
| Probing standard stroke | 0.2mm | |
| Stage accuracy | +/-2.0um | |
| Z axis | Control resolution | 0.167um |
| Max. speed | 30mm/s | |
| Withstanding load | 200kgf | |
| Rigidity | Inclination rigidity (Hot chuck) (4.7um)/(10kgf) | |
| Theta axis | Rotation range | +/-4degree |
| Resolution | 0.0000276degree | |
| F axis | Max. stroke | 39mm |
| Control resolution | 0.125um | |
| Withstanding load | 200kgf | |
| Method | ITV camera pattern matching system | |
| Fine alignment | Lighting | LED light, coaxial and oblique lighting |
| Visibility | Low mag 3.33 x 3.12mm | |
| High mag 0.51 x 0.48mm | ||
| Screen size | 15 - inch | |
| Alignment image color | Color | |
| Liquid crystal Display | Display color | 16770000 colors |
| Display area | 1024 x 768 pixels | |
| Touch switch | 1024 x 1024 dot matrix | |
| Handling method | Ceramic Arm | |
| Loader | No. of cassette stored | 1 |
| Applicable cassette / FOUP | - 300mm FOUP, FOSB, open cassette conform to SEMI standard | |
| - 200mm open cassette | ||
| Voltage | 200/220/230/240VAC | |
| Miscellaneous | Power consumption | 3.0kVA (max.) |
| Air pressure | 0.6 to 0.99MPa | |
| Vacuum pressure | -100 to -53kpa | |
| Width | 1,525mm | |
| Dimension | Depth | 1,622mm |
| Height | 967mm (1,422mm including loadport) | |
| Weight | Approximately 1,650kg |
