Thin wafer mounted on the dicing frame, diced wafer and CSP substrate are automatically transferred by frame and gone through the probing test.
For more details, contact us at (049) 544-1111 or send us your inquiries at dennish.solis@edgeworthcorp.com.
1. It performs the precision measurement using our unique correction technology on cut wafer, package and such that are attached to the dicing frame.
2.It is the multi-functional prober which perfoms transfer and testing on a frame as well as wafer of 8 to 12 inches.
3. The prober’s total X/Y axis positioning precision is +/-1.5um.
4. The high rigidity cleaning stage combines with large plate enables cleaning by cleaning stage on large card such as multi-cards, etc.
5. Throughput is improved by the new linear motor drive XY stage with its ability of control vibration generated from accelaration and high speed operation
| Wafer size | 200mm, 300mm (at frame) | |
| Thickness | 20um to 2000um | |
| Applicable wafes | Thickness Variation | +/-50um max. |
| Frame (Dicing ring) | 2-8-1, 2-12-1, 2-12 | |
| Die size | 0.2mm to 100mm (not exceeded to 1,000,000 chips) | |
| Overall precision | +/-1.5um | |
| Multi-probing | Maximum sites | 2048 dies maximum (Please contact our Sales Dept.) |
| Probe area | +/-160mm max. | |
| Stage precision | +/-0.5um | |
| X, Y axis | Resolution | 0.5nm (0.0005um) |
| Max. speed | XY : 500mm/s | |
| Static load withstand (horizontally) | 20kgf | |
| Max. stroke | 37mm | |
| Probing standard stroke | 0.2mm | |
| Z axis | Stage accuracy | +/-2.0um |
| Control resolution | 0.167um | |
| Max. speed | 30mm/s | |
| Withstanding load | 200kgf | |
| Theta axis | Rotation range | +/-4degree |
| Resolution | 0.0000276degree | |
| Max. stroke | 39mm | |
| F axis | Resolution | 0.125um |
| Max. speed | 18mm/s | |
| Fine alignment | Method | ITV camera pattern matching system |
| Lighting | LED light, coaxial and oblique lighting | |
| - Non-colored type: Low mag 3.33 x 3.12mm | ||
| - Non-colored type: High mag 0.51 x 0.48mm | ||
| Visibility | - Colored type: Low mag 4.23 x 3.12mm | |
| - Colored type: High mag 0.63 x 0.47mm | ||
| - Colored type: Super high mag 0.317 x 0.235mm | ||
| Screen size | 15 - inch | |
| Alignment image color | Color | |
| Liquid crystal Display | Display color | 650000 colors |
| Display area | 1024 x 768 pixels | |
| Touch switch | 1024 x 1024 dot matrix | |
| Handling method | Ceramic transfer Arm | |
| Loader | Elevator | 1 or 2 cassette at 3 slot (option) |
| Applicable cassette / FOUP | - 12" (13 or 25 slot) | |
| - 8" (25 slot) | ||
| Voltage | 200/220/230/240VAC | |
| Power consumption | 3.0kVA (max.) | |
| Miscellaneous | Air pressure | 0.6 to 0.99MPa |
| Air pressure | -100 to -53kpa | |
| Width | 1,571mm | |
| Dimension | Depth | 1,764mm |
| Height | 1542mm | |
| Weight | Approximately 1,700kg |
