Machine ready for tape frame transportation. The Prober developed base on the high-end 200mm Prober UF2000, which adopt the frame handling.
For more details, contact us at (049) 544-1111 or send us your inquiries at dennish.solis@edgeworthcorp.com.
Machine ready for tape frame transportation. The Prober developed base on the high-end 200mm Prober UF2000, which adopt the frame handling.
For more details, contact us at (049) 544-1111 or send us your inquiries at dennish.solis@edgeworthcorp.com.
1. It performs the precision measurement using our unique correction technology on cut wafer, package and such that are attached to the dicing frame.
2.It is the multi-functional prober which perfoms transfer and testing on a frame as well as wafer of 5 to 8 inches with only one click of button.
3. The prober’s total X/Y axis positioning precision is +/-1.5um.
4. High-rigidity “TRIPOD” Z/θ stage to realize stable high pin count or multi measurement highly evaluated Z/theta stage “TRIPOD” drives by three ball screws, improved the rigidity even more, and it can ensure enough stability for further multi-pin, multi-measurement.
5. The high rigidity cleaning stage combines with large plate enables cleaning by cleaning stage on large card such as multi-cards, etc.
| Wafer size | 5", 6", 8" (only wafer) | |
| 4", 5", 6", 8" (with frame) | ||
| Thickness | 300um to 1000um (not warped) | |
| 20um to 2000um (with frame) | ||
| Applicable wafes | Thickness Variation | +/-50um max. |
| Frame (Dicing ring) | 2-8-1, 2-6-1 | |
| Die size | 0.2mm to 100mm (not exceeded to 1,000,000 chips) | |
| Overall precision | +/-1.5um | |
| Multi-probing | Maximum sites | 64 site (2048 sites option is available) |
| Probe area | +/-120mm max. | |
| X, Y axis | Stage precision | +/-1.5um |
| Resolution | 0.1um | |
| Max. speed | X : 250mm/s, Y : 200mm/s | |
| Max. stroke | 47mm | |
| Probing standard stroke | 0.2mm | |
| Z axis | Stage accuracy | +/-2.0um |
| Control resolution | 0.25um | |
| Max. speed | 30mm/s | |
| Withstanding load | 120kgf | |
| Theta axis | Rotation range | +/-5degree |
| Resolution | 0.00007degree | |
| Method | ITV camera pattern matching system | |
| Fine alignment | Lighting | LED light, coaxial and oblique lighting |
| Visibility | Low mag 3.33 x 3.12mm | |
| High mag 0.51 x 0.48mm | ||
| Screen size | 12.1 - inch | |
| Alignment image color | Black and white | |
| Liquid crystal Display | Display color | 650000 colors |
| Display area | 800 x 600 pixels | |
| Touch switch | 1024 x 1024 dot matrix | |
| Handling method | Ceramic transfer Arm | |
| Transfortation weight | 0.5kg max. including frame | |
| Loader | Cassette | 1 |
| Applicable cassette /Frame | Wafer: SEMI standard | |
| Frame: 6", 8" (25slots) | ||
| Voltage | 100/200/210/220/230/240VAC 50/60Hz | |
| Miscellaneous | Power consumption | 1.3kVA max. including hot chuck |
| Air pressure | 0.45 to 0.7MPa | |
| Vacuum pressure | -100 to -53kpa | |
| Width | 1,322mm | |
| Dimension | Depth | 1,454mm |
| Height | 943mm | |
| Weight | Approximately 900kg | |
