Automatic Packer/Unpacker: AWS3004

  • 12″ Wafer Handling
  • 4x Load port for FOSB/FOUP
  • Capable to handle Jelly Jar, Coin box, and FOSB
  • Detection of Wafer Protrusion from Cassette
  • Wafer Cross Slot Detection
  • Wafer at Cassette Mapping Graphic
  • Bernoulli end effector wafer handling
  • Advance 3-axis Robot Assembly
  • Intelligence Wafer Pre-alignment
  • Build in OCR
  • Recipe Wafer Control System
  • Handheld Barcode Reader for Lot Tracking
  • Wafer Flipper Assembly
  • Industrial PC Base Software
  • Capable to Customize Handshake with 3rd Party System (Option)