5-inch to 8-inch wafer probing machine. Super high rigid machine for memory. Variety of options enables all kinds of wafer tests that are not standard in this industry.
For more details, contact us at (049) 544-1111 or send us your inquiries at dennish.solis@edgeworthcorp.com.
1. It performs transfer and testing on 5 to 8 inch wafer. Adopts MMI, which is same as UF2000.
2. Highly accurate prober having the total positioning accuracy of 4μm over X/Y axes.
3.High rigidity Z/theta stage enables stable multi-site probing.
4. Automatic setup functions including automatic probing and probe/wafer alignment functions.
5. Large storage media eases the works such as upgrading the system software and also can back up device parameter and measurement result in HDD easily.
6.Variety of options enables all kinds of wafer tests that are not standard in this industry.
| Wafer Diameter | 5", 6" and 8" | |
| Thickness | 150 to 1000um (not warped) | |
| Applicable wafes | Thickness Viration | +/-50um max. |
| Die size | 0.25mm to 100mm (0.1um graduations) | |
| Overall precision | Within +/-4um | |
| Multi-probing | Maximum sites | 64 site (2048 sites option is available) |
| Probe area | Max. +/-120mm | |
| X, Y axis | Resolution | 0.5um |
| Max. speed | 300mm/s | |
| Max. stroke | 69mm | |
| Probing standard stroke | 0.5mm | |
| Z axis | Control accuracy | +/-2.0um |
| Resolution | 0.25um | |
| Max. speed | 30mm/s | |
| Theta axis | Rotation range | +/-5degree |
| Resolution | 0.00024degree | |
| Fine alignment unit | Principal system | Pattern matching with ITV camera |
| Lighting | LED lamps for coaxial and oblique lighting | |
| Field of view | Low mag: Approx. 3.33 x 3.12mm | |
| High mag: Aprprox. 0.51 x 0.48mm | ||
| Screen size | 12.1 - inch | |
| Alignment image color | Monochrome | |
| Liquid crystal Display | Display color | 650 thousand colors |
| Display area | 800 x 600 pixels | |
| Touch switch | 1024 x 1024 dot matrix | |
| Handling method | Ceramic transfer Arm | |
| Loader | Elevator (cassette) | 1 elevator (2nd elevator option available) |
| Applicable cassette | SEMI standard compatible | |
| Voltage | 100/200/210/220/230/240VAC 50/60Hz | |
| Miscellaneous | Power consumption | 1.3kVA (hot chuck includes) |
| Air pressure | 0.4MPa above | |
| Vacuum pressure | -53kpa | |
| Width | 1,092mm | |
| Dimension | Depth | 1,115mm |
| Height | 887mm (933mm with optional card changer) | |
| Weight | Approximately 800kg | |
