High-end Prober for 5-inch to 8-inch wafer which achieves both precision and throughput in high dimension.
For more details, contact us at (049) 544-1111 or send us your inquiries at dennish.solis@edgeworthcorp.com.
High-end Prober for 5-inch to 8-inch wafer which achieves both precision and throughput in high dimension.
For more details, contact us at (049) 544-1111 or send us your inquiries at dennish.solis@edgeworthcorp.com.
1. Improved high rigidity and high speed operation technology contribute to the better precision and throughput
2. Extremely accurate Prober having positioning accuracy of 1.5μm including the X/Y axes.
3. Highly evaluated Z/theta stage “TRIPOD” drives by three ball screws, improved the rigidity even more, and it can ensure enough stability for further multi-pin, multi-measurement
4. Automatic setup functions including automatic probing and probe/wafer alignment functions.
5. Large storage media eases the works such as upgrading the system software and also can back up device parameter and measurement result in HDD easily.
6.Variety of options enables all kinds of wafer tests that are not standard in this industry.
| Wafer Diameter | 5", 6" and 8" and 4" is optionally available | |
| Thickness | 150 to 1000um (not warped) | |
| Applicable wafes | Thickness Viration | +/-50um max. |
| Die size | 0.25mm to 100mm (0.1um graduations) | |
| Overall precision | Within +/-1.5um | |
| Multi-probing | Maximum sites | 64 site (2048 sites option is available) |
| Probe area | Max. +/-120mm | |
| X, Y axis | Resolution | 0.1um |
| Resolution | X:250mm/sec, Y:200mm/sec | |
| Max. stroke | 47mm | |
| Stage accuracy | +/-2.0um | |
| Z axis | Resolution | 0.25um |
| Max. speed | 30mm/s | |
| Load-carrying capacity | 120kgf | |
| Capable for 1 touch probe testing | 450 kgf | |
| Theta axis | Rotation range | +/-5degree |
| Resolution | 0.00007degree | |
| Fine alignment unit | Principal system | Pattern matching with ITV camera |
| Lighting | LED light, coaxial and oblique lighting | |
| Field of view | Low mag: Approx. 3.33 x 3.12mm | |
| High mag: Aprprox. 0.51 x 0.48mm | ||
| Screen size | 12.1 - inch | |
| Alignment image color | Black and white | |
| Liquid crystal Display | Display color | 650 thousand colors |
| Display area | 800 x 600 pixels | |
| Touch switch | 1024 x 1024 dot matrix | |
| Handling method | Ceramic transfer Arm | |
| Loader | No. of cassette stored | Single loadport |
| Applicable cassette / FOUP | Based on SEMI standards | |
| Voltage | 100VAC 50/60HZ (supply voltage should be confirmed before an order | |
| Miscellaneous | Power consumption | 1.3kVA (hot chuck includes) |
| Air pressure | 0.45 to 0.7MPa | |
| Vacuum pressure | -100 to -53kpa | |
| Width | 1,142mm | |
| Dimension | Depth | 1,229mm |
| Height | 933mm | |
| Weight | Approximately 800kg |
