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Frontier Semiconductor Measurements, Inc. (FSM)
| Machine Function |
Wafer Thickness, Warpage and
Roughness Measurement |
Click here for more details |
| Model Name |
FSM 413 |
| Dimensions |
L |
x |
W |
x |
H |
| mm |
|
x |
|
x |
|
| inches |
|
x |
|
x |
|
| Weight (kg / lbs) |
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| Facilities |
|
| Electrical VAC |
|
| Phase |
|
| Hertz |
|
| KVA Rating |
|
| Air CDA |
|
| (kg/cm2 : psi) |
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| liters/min : gpm |
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|
| Vacuum |
|
| (kg/cm2 : psi) |
|
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|
| liters/min : gpm |
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| N2 |
|
| (kg/cm2 : psi) |
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|
| liters/min : gpm |
|
|
|
| City Water |
|
| (kg/cm2 : psi) |
|
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|
| liters/min : gpm |
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|
| temp, C |
|
| DI Water |
|
| (kg/cm2 : psi) |
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|
| liters/min : gpm |
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|
| temp, C |
|
| Machine Function |
Video Inspection and 2D&3D
Measurement System |
Click here for more details |
| Model Name |
FSMA VideoMic |
| Dimensions |
L |
x |
W |
x |
H |
| mm |
|
x |
|
x |
|
| inches |
|
x |
|
x |
|
| Weight (kg / lbs) |
|
|
|
| Facilities |
|
| Electrical VAC |
|
| Phase |
|
| Hertz |
|
| KVA Rating |
|
| Air CDA |
|
| (kg/cm2 : psi) |
|
|
|
| liters/min : gpm |
|
|
|
| Vacuum |
|
| (kg/cm2 : psi) |
|
|
|
| liters/min : gpm |
|
|
|
| N2 |
|
| (kg/cm2 : psi) |
|
|
|
| liters/min : gpm |
|
|
|
| City Water |
|
| (kg/cm2 : psi) |
|
|
|
| liters/min : gpm |
|
|
|
| temp, C |
|
| DI Water |
|
| (kg/cm2 : psi) |
|
|
|
| liters/min : gpm |
|
|
|
| temp, C |
|
|
|
|
|